Features  

·Integrated vacuum evaporate deposition (VED), physical vapordeposition (PVD), reactive plasma deposition (RPD).

·Deposition of thin film layers for perovskite solar cells can be realizedin one single equipment (SPE1000T), equivalent to the capacity ofthree equipment. 

·Continuous vacuum coating minimizes substrate loading/unloadingand exposure of film layers to atmospheric condition, improving cellefficiency.

·Required cleanroom area reduced by 40% and the equipment costdecreased by 30%.